Open Access

Using Explainable Artificial Intelligence to Improve Process Quality: Evidence from Semiconductor Manufacturing

Julian Senoner
Julian Senoner
[email protected]
https://orcid.org/0000-0001-6633-5602
Department of Management, Technology, and Economics, ETH Zurich, 8092 Zurich, Switzerland
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Torbjørn Netland
Torbjørn Netland
[email protected]
https://orcid.org/0000-0001-7382-1051
Department of Management, Technology, and Economics, ETH Zurich, 8092 Zurich, Switzerland
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Stefan Feuerriegel
Stefan Feuerriegel
[email protected]
https://orcid.org/0000-0001-7856-8729
Department of Management, Technology, and Economics, ETH Zurich, 8092 Zurich, Switzerland
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Julian Senoner

[email protected]

https://orcid.org/0000-0001-6633-5602

Department of Management, Technology, and Economics, ETH Zurich, 8092 Zurich, Switzerland

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Torbjørn Netland

[email protected]

https://orcid.org/0000-0001-7382-1051

Department of Management, Technology, and Economics, ETH Zurich, 8092 Zurich, Switzerland

Search for more papers by this author

Stefan Feuerriegel

[email protected]

https://orcid.org/0000-0001-7856-8729

Department of Management, Technology, and Economics, ETH Zurich, 8092 Zurich, Switzerland

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Published Online:9 Dec 2021https://doi.org/10.1287/mnsc.2021.4190

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Volume 68, Issue 8

August 2022

Pages 5557-6354, iv-v

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Received:April 15, 2020
Accepted:June 16, 2021
Published Online:December 09, 2021

Cite as

Julian Senoner, Torbjørn Netland, Stefan Feuerriegel (2021) Using Explainable Artificial Intelligence to Improve Process Quality: Evidence from Semiconductor Manufacturing. Management Science 68(8):5704-5723.

https://doi.org/10.1287/mnsc.2021.4190

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Using Explainable Artificial Intelligence to Improve Process Quality: Evidence from Semiconductor Manufacturing

Volume 68, Issue 8

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