Using Explainable Artificial Intelligence to Improve Process Quality: Evidence from Semiconductor Manufacturing

• Julian Senoner

  Julian Senoner

  [email protected]

  https://orcid.org/0000-0001-6633-5602

  Department of Management, Technology, and Economics, ETH Zurich, 8092 Zurich, Switzerland

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• Torbjørn Netland

  Torbjørn Netland

  [email protected]

  https://orcid.org/0000-0001-7382-1051

  Department of Management, Technology, and Economics, ETH Zurich, 8092 Zurich, Switzerland

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• Stefan Feuerriegel

  Stefan Feuerriegel

  [email protected]

  https://orcid.org/0000-0001-7856-8729

  Department of Management, Technology, and Economics, ETH Zurich, 8092 Zurich, Switzerland

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